A high-precision micro-displacement sensor based on tunnel magneto-resistance efect is reported.We designed and simulated magnetic characteristics of the sensor, and employed chip-level Au-In bonding to implement low-temperature assembly of the TMR devices. We employed the subdivision interpolation technique to enhance the resolution by translating the sine-cosine outputs of a TMR sensor into an output that varies linearly with the displacement. Simultaneously, using the multibridge circuit method to suppress external magnetic and geomagnetic interference. Experimental result shows that the micro-displacement sensor has a resolution of 800 nm, accuracy of 0.14% and a full-scale range of up to millimeter level. This work enables a high-performance displacement sensor, and provides a signifcant guide for the design of a micro-displacement sensor in practical applications.

C. G. Xin et al.,Sci. Rep12,1(2022).