硅基光子研究中心重点开展微纳光栅多运动参量精密传感器、微纳米线片上混合集成光子器件等研究，在新型光栅光学自成像精密位移传感、单纳米线超低功耗非线性转换、纳米线MOEMS惯性测量等方面取得具有国际影响力的重要学术成果，力争推动光栅位移传感器、片上可集成光源、新效应MOEMS惯性传感器等在半导体制造、精密机械加工、光通信、航空航天等领域的产业化应用。
中心现有教授4人、副教授3人、学生20人左右，承担了国家重大仪器专项、国家自然科学基金、国防科技创新特区、装发预研、领域基金等重大项目多项，在Nano Letters、Crystal Growth&Design、Optics Express等知名期刊发表30余篇高水平学术论文，申请30余项发明专利。
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review
Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings
Design and simulation of a waveguiding MOEMS gyroscope with ultrawide optical bandwidth based on tunable cascaded Fabry–Perot cavities
An Ultracompact Angular Displacement Sensor Based on the Talbot Effect of Optical Microgratings
Ultracompact single‑layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides
Ultra-compact displacement and vibration sensor with a sub-nanometric resolution based on Talbot effect of optical microgratings
